This novel material, which we call Ultrananocrystalline diamond (UNCD), is a form of natural diamondnot a diamond-like compound. UNCD possesses the material properties of natural diamond in thin film form. Its extreme hardness, smoothness, low friction, excellent thermal characteristics and inertness make it nature's perfect material. It can be manipulated using traditional integrated manufacturing techniques, and is currently being used in MEMS devices, biosensors, electron sources and friction and wear coatings.