Lumarray is a lithography company with a state-of-the-art-patented technology, developed at MIT, that departs from a century old tradition of conventional optics. Our technology, Zone-Plate-Array Lithography (ZPAL), integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the decades to come.

We at Lumarray believe that it is time to provide a completely new way of doing lithography that will be advantageous in terms of cost and flexibility. We are working to commercialize a high-throughput maskless lithography tool that would allow for the possibility to transfer a design drawn on a computer screen directly onto a substrate. ZPAL technology is extendable to many future generations of semiconductor devices and should be capable of reaching the absolute limits of the lithographic process.