Amphibian™ Systems provides advanced exposure tools, instruments, metrology systems, and prototype equipment for research in areas of photoresist materials, optical components testing, immersion fluids, and advanced lithographic development.
Advances in UV optical lithography will extend toward the nanoscale for application in the fields of semiconductor devices, nano and micro structures, advanced packaging, bio devices, and optical components. Amphibian™ Systems provides the technology needed for the fabrication, measurement, and testing of the nano-scale structures used in these fields.

Amphibian™ Systems has developed lithography tools for research into materials and processes extending toward the 32nm device generations. These systems provide the early learning required for applications identified by the International Technology Roadmap for Semiconductors (ITRS) out to the year 2013.