Unique capabilities important to the MEMS industry:

Microchem SU-8 Resist removal:
Our Microwave Plasma can remove this very difficult to remove epoxy resist at up to 4 microns per minute (Four 6" wafers at a time.) without any resisdues left.

Bosch process Sidewall Polymer removal:
Our Microwave Plasma is able to remove this very difficult to remove polymer without leaving any residues.

Sacrificial Layer Removal:
Our Microwave Plasma is able to remove deep underlying polymer layers without leaving any residues.

We also have many other applications of interest to the industry.