The facility includes a cleanroom with 2,600 square feet of class 100 space and 1,200 square feet of class 10 space, as well as three thin film labs. The Nanofab is a self supporting facility managed by the Electrical and Computer Engineering Department and occupies space on the F level of Hamerschlag Hall and on the 2nd floor of the College of Engineering building, Roberts Hall.

The facility was originally constructed by the university to support the thin film and solid state electronics research conducted primarily by the DSSC and the ECE department. Research requiring the use of the facility is inherently multidisciplinary. Faculty, staff, and students access the labs and collaborate on projects originating from the ECE, Materials Science and Engineering, Physics, Robotics, Chemical Engineering, Mechanical Engineering, Biology, Biomedical Engineering, Chemistry, DSSC, MEMS Lab, ICES, CNEXT, and industry. Areas of research include process development of data storage materials and devices, microelectromechanical systems, semiconductor materials and quantum structures, and integrated electro-optics.