The company IMS - Ionen Mikrofabrikations Systeme GmbH was founded in 1985 by a group of scientists in response to the opportunity to apply their extensive know how and experience in ion beam technologies to the emerging need for a new microlithography technology.

IMS has designed a number of prototype ion beam tools fully proving the projection lithography principles. Extensive development efforts have created a technology platform to be used for future system development for electron beam based mask-less lithography and ion beam modification and production of structures in the micro- and nanotechnology markets.

The company IMS Nanofabrication GmbH was established in 2001 as a wholly owned subsidiary with the purpose to pursue commercial opportunities. Both companies are operating in unison, located at the same premises in Vienna, and further particulars refer to both organizations. Today IMS employs about 35 highly skilled experts in the field of "charged particle optics" and related subjects (electronics, software, mechanical, system design, etc.). Key competencies are defined and kept in-house, other tasks are outsourced to well established R&D institutions and supplier network.The shareholders of IMS include venture capital and governmental organizations. Over 90% of the shares are in the hands of Austrian organizations.