The company is developing metrological devices for ultra-high precision positioning and MEMS/NEMS (Micro/Nano-Electro Mechanical Systems) devices.

The prime application areas are lithographic mask alignment for the new generation of wafers (sub-0.13 micrometer pattern, 300 mm diameter) and profilometery of wafer surface. Quantum Precision Instruments nanoTrekTM devices belong to a totally new class of electro-mechanical nanodevices capable of extremely precise measurement of translations, angular alignment, accelerations, and vibrations as well as several other measurements.